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sklademVydáno: 2015-03-03
15/30291643 DC
BS ISO 18516. Surface chemical analysis. Determination of lateral resolution and sharpness in beam based methods
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| Označení normy: | 15/30291643 DC |
| Počet stran: | 58 |
| Vydáno: | 2015-03-03 |
| Status: | Draft for Comment |
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15/30291643 DC
This standard 15/30291643 DC BS ISO 18516. Surface chemical analysis. Determination of lateral resolution and sharpness in beam based methods is classified in these ICS categories:
- 71.040.40 Chemical analysis