Hlavní stránka>18/30383935 DC BS EN IEC 62047-37. Semiconductor devices. Micro-electromechanical devices Part 37. Environmental test methods of MEMS piezoelectric thin films for sensor application
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sklademVydáno: 2018-12-04
18/30383935 DC
BS EN IEC 62047-37. Semiconductor devices. Micro-electromechanical devices Part 37. Environmental test methods of MEMS piezoelectric thin films for sensor application
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18/30383935 DC
Počet stran:
19
Vydáno:
2018-12-04
Status:
Draft for Comment
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18/30383935 DC
This standard 18/30383935 DC BS EN IEC 62047-37. Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
