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sklademVydáno: 2018-12-04
18/30383935 DC
BS EN IEC 62047-37. Semiconductor devices. Micro-electromechanical devices Part 37. Environmental test methods of MEMS piezoelectric thin films for sensor application
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| Označení normy: | 18/30383935 DC |
| Počet stran: | 19 |
| Vydáno: | 2018-12-04 |
| Status: | Draft for Comment |
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18/30383935 DC
This standard 18/30383935 DC BS EN IEC 62047-37. Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
- 31.080.01 Semiconductor devices in general
- 31.080.99 Other semiconductor devices
- 31.140 Piezoelectric devices