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24/30486622 DC
BS EN IEC 62047-49. Semiconductor devices. Micro-electromechanical devices Part 49. Reliability test methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever
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| Označení normy: | 24/30486622 DC |
| Počet stran: | 11 |
| Vydáno: | 2024-02-01 |
| Status: | Draft for Comment |
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24/30486622 DC
This standard 24/30486622 DC BS EN IEC 62047-49. Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
- 31.080 Semiconductor devices
- 31.080.99 Other semiconductor devices