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sklademVydáno: 2024-07-12
24/30497109 DC
BS EN IEC 63068-5 Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices Part 5. Test method for defects using X-ray topography
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| Označení normy: | 24/30497109 DC |
| Počet stran: | 32 |
| Vydáno: | 2024-07-12 |
| Status: | Draft for Comment |
Popis
24/30497109 DC
This standard 24/30497109 DC BS EN IEC 63068-5 Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices is classified in these ICS categories:
- 31.080.99 Other semiconductor devices