Hlavní stránka>BS EN ISO 25178-603:2013 Geometrical product specifications (GPS). Surface texture: Areal Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
This standard BS EN ISO 25178-603:2013 Geometrical product specifications (GPS). Surface texture: Areal is classified in these ICS categories:
17.040.20 Properties of surfaces
17.040.40 Geometrical Product Specification (GPS)
This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.