BS ISO 12406:2010

This standard BS ISO 12406:2010 Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of arsenic in silicon is classified in these ICS categories:

• 71.040.40 Chemical analysis

This International Standard specifies a secondary-ion mass spectrometric method using magnetic-sector or quadrupole mass spectrometers for depth profiling of arsenic in silicon, and using stylus profilometry or optical interferometry for depth calibration. This method is applicable to single-crystal, poly-crystal or amorphous silicon specimens with arsenic atomic concentrations between 1 × 10¹⁶ atoms/cm³ and 2,5 × 10²¹ atoms/cm³, and to crater depths of 50 nm or deeper.