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sklademVydáno: 2013-10-31
BS ISO 13424:2013 Surface chemical analysis. X-ray photoelectron spectroscopy. Reporting of results of thin-film analysis

BS ISO 13424:2013

Surface chemical analysis. X-ray photoelectron spectroscopy. Reporting of results of thin-film analysis

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Označení normy:BS ISO 13424:2013
Počet stran:58
Vydáno:2013-10-31
ISBN:978 0 580 68394 7
Status:Standard
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BS ISO 13424:2013


This standard BS ISO 13424:2013 Surface chemical analysis. X-ray photoelectron spectroscopy. Reporting of results of thin-film analysis is classified in these ICS categories:
  • 71.040.40 Chemical analysis

This International Standard specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.