BS ISO 14237:2010

This standard BS ISO 14237:2010 Surface chemical analysis. Secondary-ion mass spectrometry. Determination of boron atomic concentration in silicon using uniformly doped materials is classified in these ICS categories:

• 71.040.40 Chemical analysis

This International Standard specifies a secondary-ion mass spectrometric method for the determination of boron atomic concentration in single-crystalline silicon using uniformly doped materials calibrated by a certified reference material implanted with boron. This method is applicable to uniformly doped boron in the concentration range from 1 × 10¹⁶ atoms/cm³ to 1 × 10²⁰ atoms/cm³.