BS ISO 15632:2021

This standard BS ISO 15632:2021 Microbeam analysis. Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA) is classified in these ICS categories:

• 71.040.99 Other standards related to analytical chemistry
• 19.100 Non-destructive testing

This document defines the most important quantities that characterize an energy-dispersive X?ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This document is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This document specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309^{[ 2]} and ASTM E1508^{[ 3]} and is outside the scope of this document.