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sklademVydáno: 2016-07-31
BS ISO 16700:2016
Microbeam analysis. Scanning electron microscopy. Guidelines for calibrating image magnification
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| Označení normy: | BS ISO 16700:2016 |
| Počet stran: | 30 |
| Vydáno: | 2016-07-31 |
| ISBN: | 978 0 580 89052 9 |
| Status: | Standard |
Popis
BS ISO 16700:2016
This standard BS ISO 16700:2016 Microbeam analysis. Scanning electron microscopy. Guidelines for calibrating image magnification is classified in these ICS categories:
- 37.020 Optical equipment
This International Standard specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.