BS ISO 16700:2016

This standard BS ISO 16700:2016 Microbeam analysis. Scanning electron microscopy. Guidelines for calibrating image magnification is classified in these ICS categories:

• 37.020 Optical equipment

This International Standard specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.