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Hlavní stránka>BS ISO 18114:2021 - TC Tracked Changes. Surface chemical analysis. Secondary-ion mass spectrometry. Determination of relative sensitivity factors from ion-implanted reference materials
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sklademVydáno: 2021-06-24
BS ISO 18114:2021 - TC Tracked Changes. Surface chemical analysis. Secondary-ion mass spectrometry. Determination of relative sensitivity factors from ion-implanted reference materials

BS ISO 18114:2021 - TC

Tracked Changes. Surface chemical analysis. Secondary-ion mass spectrometry. Determination of relative sensitivity factors from ion-implanted reference materials

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Označení normy:BS ISO 18114:2021 - TC
Počet stran:36
Vydáno:2021-06-24
ISBN:978 0 539 18162 3
Status:Tracked Changes
Popis

BS ISO 18114:2021 - TC


This standard BS ISO 18114:2021 - TC Tracked Changes. Surface chemical analysis. Secondary-ion mass spectrometry. Determination of relative sensitivity factors from ion-implanted reference materials is classified in these ICS categories:
  • 71.040.40 Chemical analysis

This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.

The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.


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