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sklademVydáno: 2019-06-19
BS ISO 21859:2019
Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment
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| Označení normy: | BS ISO 21859:2019 |
| Počet stran: | 12 |
| Vydáno: | 2019-06-19 |
| ISBN: | 978 0 580 96201 1 |
| Status: | Standard |
Popis
BS ISO 21859:2019
This standard BS ISO 21859:2019 Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment is classified in these ICS categories:
- 81.060.30 Advanced ceramics
This document specifies a test method for plasma resistance of ceramic components in semiconductor manufacturing equipment. It is applicable to ceramic components of plasma-resistant components in dry etching chambers used in semiconductor manufacturing.