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sklademVydáno: 2020-08-26
BS ISO 22278:2020
Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam
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| Označení normy: | BS ISO 22278:2020 |
| Počet stran: | 38 |
| Vydáno: | 2020-08-26 |
| ISBN: | 978 0 580 98589 8 |
| Status: | Standard |
Popis
BS ISO 22278:2020
This standard BS ISO 22278:2020 Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam is classified in these ICS categories:
- 81.060.30 Advanced ceramics
This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.