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Homepage>18/30383935 DC BS EN IEC 62047-37. Semiconductor devices. Micro-electromechanical devices Part 37. Environmental test methods of MEMS piezoelectric thin films for sensor application
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sklademVydáno: 2018-12-04
18/30383935 DC BS EN IEC 62047-37. Semiconductor devices. Micro-electromechanical devices Part 37. Environmental test methods of MEMS piezoelectric thin films for sensor application

18/30383935 DC

BS EN IEC 62047-37. Semiconductor devices. Micro-electromechanical devices Part 37. Environmental test methods of MEMS piezoelectric thin films for sensor application

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Označení normy:18/30383935 DC
Počet stran:19
Vydáno:2018-12-04
Status:Draft for Comment
DESCRIPTION

18/30383935 DC


This standard 18/30383935 DC BS EN IEC 62047-37. Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
  • 31.080.01 Semiconductor devices in general
  • 31.080.99 Other semiconductor devices
  • 31.140 Piezoelectric devices