Homepage>23/30454370 DC BS EN IEC 62047-46. Semiconductor devices. Micro-electromechanical devices Part 46. Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale membrane
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sklademVydáno: 2023-04-19
23/30454370 DC
BS EN IEC 62047-46. Semiconductor devices. Micro-electromechanical devices Part 46. Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale membrane
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Označení normy:
23/30454370 DC
Počet stran:
15
Vydáno:
2023-04-19
Status:
Draft for Comment
DESCRIPTION
23/30454370 DC
This standard 23/30454370 DC BS EN IEC 62047-46. Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
