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Homepage>23/30454374 DC BS EN IEC 62047-47. Semiconductor devices. Micro-electromechanical devices Part 47. Silicon based MEMS fabrication technology. Measurement method of bending strength of microstructures
sklademVydáno: 2023-04-20
23/30454374 DC BS EN IEC 62047-47. Semiconductor devices. Micro-electromechanical devices Part 47. Silicon based MEMS fabrication technology. Measurement method of bending strength of microstructures

23/30454374 DC

BS EN IEC 62047-47. Semiconductor devices. Micro-electromechanical devices Part 47. Silicon based MEMS fabrication technology. Measurement method of bending strength of microstructures

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Označení normy:23/30454374 DC
Počet stran:16
Vydáno:2023-04-20
Status:Draft for Comment
DESCRIPTION

23/30454374 DC


This standard 23/30454374 DC BS EN IEC 62047-47. Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
  • 31.080.99 Other semiconductor devices

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