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Homepage>BS EN 62047-21:2014 Semiconductor devices. Micro-electromechanical devices Test method for Poisson's ratio of thin film MEMS materials

BS EN 62047-21:2014

Semiconductor devices. Micro-electromechanical devices Test method for Poisson's ratio of thin film MEMS materials

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Označení normy:	BS EN 62047-21:2014
Počet stran:	18
Vydáno:	2014-10-31
ISBN:	978 0 580 77554 3
Status:	Standard

DESCRIPTION

BS EN 62047-21:2014

This standard BS EN 62047-21:2014 Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:

31.080.99 Other semiconductor devices

This part of IEC 62047 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 μm.

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