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Homepage>BS EN 62374:2007 Semiconductor devices. Time dependent dielectric breakdown (TDDB) test for gate dielectric films
sklademVydáno: 2008-10-31
BS EN 62374:2007 Semiconductor devices. Time dependent dielectric breakdown (TDDB) test for gate dielectric films

BS EN 62374:2007

Semiconductor devices. Time dependent dielectric breakdown (TDDB) test for gate dielectric films

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Označení normy:BS EN 62374:2007
Počet stran:24
Vydáno:2008-10-31
ISBN:978 0 580 54048 6
Status:Standard
DESCRIPTION

BS EN 62374:2007


This standard BS EN 62374:2007 Semiconductor devices. Time dependent dielectric breakdown (TDDB) test for gate dielectric films is classified in these ICS categories:
  • 31.080.99 Other semiconductor devices
  • 31.080.01 Semiconductor devices in general
Provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure