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Homepage>BS EN 62374:2007 Semiconductor devices. Time dependent dielectric breakdown (TDDB) test for gate dielectric films

BS EN 62374:2007

Semiconductor devices. Time dependent dielectric breakdown (TDDB) test for gate dielectric films

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Označení normy:	BS EN 62374:2007
Počet stran:	24
Vydáno:	2008-10-31
ISBN:	978 0 580 54048 6
Status:	Standard

DESCRIPTION

BS EN 62374:2007

This standard BS EN 62374:2007 Semiconductor devices. Time dependent dielectric breakdown (TDDB) test for gate dielectric films is classified in these ICS categories:

31.080.99 Other semiconductor devices
31.080.01 Semiconductor devices in general

Provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure

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