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Homepage>BS IEC 62047-42:2022 Semiconductor devices. Micro-electromechanical devices Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever
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sklademVydáno: 2022-10-24
BS IEC 62047-42:2022 Semiconductor devices. Micro-electromechanical devices Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever

BS IEC 62047-42:2022

Semiconductor devices. Micro-electromechanical devices Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever

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Označení normy:BS IEC 62047-42:2022
Počet stran:24
Vydáno:2022-10-24
ISBN:978 0 539 16581 4
Status:Standard
DESCRIPTION

BS IEC 62047-42:2022


This standard BS IEC 62047-42:2022 Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
  • 31.080.99 Other semiconductor devices