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sklademVydáno: 2024-08-28
BS IEC 62047-47:2024
Semiconductor devices. Micro-electromechanical devices Silicon based MEMS fabrication technology. Measurement method of bending strength of microstructures
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| Označení normy: | BS IEC 62047-47:2024 |
| Počet stran: | 20 |
| Vydáno: | 2024-08-28 |
| ISBN: | 978 0 539 21851 0 |
| Status: | Standard |
DESCRIPTION
BS IEC 62047-47:2024
This standard BS IEC 62047-47:2024 Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
- 31.080.99 Other semiconductor devices