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sklademVydáno: 2020-07-24
BS IEC 63068-3:2020
Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices Test method for defects using photoluminescence
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Označení normy: | BS IEC 63068-3:2020 |
Počet stran: | 28 |
Vydáno: | 2020-07-24 |
ISBN: | 978 0 539 02136 3 |
Status: | Standard |
DESCRIPTION
BS IEC 63068-3:2020
This standard BS IEC 63068-3:2020 Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices is classified in these ICS categories:
- 31.080.99 Other semiconductor devices
- 31.080.01 Semiconductor devices in general