PRICES include / exclude VAT
sklademVydáno: 2010-11-30
BS ISO 12406:2010
Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of arsenic in silicon
Format
Availability
Price and currency
Anglicky Secure PDF
Immediate download
247.28 €
You can read the standard for 1 hour. More information in the category: E-reading
Reading the standardfor 1 hour
24.73 €
You can read the standard for 24 hours. More information in the category: E-reading
Reading the standardfor 24 hours
74.18 €
Anglicky Hardcopy
In stock
247.28 €
| Označení normy: | BS ISO 12406:2010 |
| Počet stran: | 24 |
| Vydáno: | 2010-11-30 |
| ISBN: | 978 0 580 66874 6 |
| Status: | Standard |
DESCRIPTION
BS ISO 12406:2010
This standard BS ISO 12406:2010 Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of arsenic in silicon is classified in these ICS categories:
- 71.040.40 Chemical analysis
This International Standard specifies a secondary-ion mass spectrometric method using magnetic-sector or quadrupole mass spectrometers for depth profiling of arsenic in silicon, and using stylus profilometry or optical interferometry for depth calibration. This method is applicable to single-crystal, poly-crystal or amorphous silicon specimens with arsenic atomic concentrations between 1 × 1016 atoms/cm3 and 2,5 × 1021 atoms/cm3, and to crater depths of 50 nm or deeper.