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BS ISO 18114:2021
Surface chemical analysis. Secondary-ion mass spectrometry. Determination of relative sensitivity factors from ion-implanted reference materials
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| Označení normy: | BS ISO 18114:2021 |
| Počet stran: | 14 |
| Vydáno: | 2021-05-18 |
| ISBN: | 978 0 539 12680 8 |
| Status: | Standard |
DESCRIPTION
BS ISO 18114:2021
This standard BS ISO 18114:2021 Surface chemical analysis. Secondary-ion mass spectrometry. Determination of relative sensitivity factors from ion-implanted reference materials is classified in these ICS categories:
- 71.040.40 Chemical analysis
This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.
The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.