PRICES include / exclude VAT
Sponsored link
sklademVydáno: 2019-06-19
BS ISO 21859:2019
Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment
Format
Availability
Price and currency
Anglicky Secure PDF
Immediate download
164.81 €
You can read the standard for 1 hour. More information in the category: E-reading
Reading the standardfor 1 hour
16.48 €
You can read the standard for 24 hours. More information in the category: E-reading
Reading the standardfor 24 hours
49.44 €
Anglicky Hardcopy
In stock
164.81 €
| Označení normy: | BS ISO 21859:2019 |
| Počet stran: | 12 |
| Vydáno: | 2019-06-19 |
| ISBN: | 978 0 580 96201 1 |
| Status: | Standard |
DESCRIPTION
BS ISO 21859:2019
This standard BS ISO 21859:2019 Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment is classified in these ICS categories:
- 81.060.30 Advanced ceramics
This document specifies a test method for plasma resistance of ceramic components in semiconductor manufacturing equipment. It is applicable to ceramic components of plasma-resistant components in dry etching chambers used in semiconductor manufacturing.