Homepage>ČSN EN ISO 23131 - Elipsometrie - Principy
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Vydáno: 01.04.2023
ČSN EN ISO 23131
Elipsometrie - Principy
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Anglicky Hardcopy
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Označení normy:
ČSN EN ISO 23131
Třídící znak:
039050
Počet stran:
28
Vydáno:
01.04.2023
Harmonizace:
Norma není harmonizována
Katalogové číslo:
516600
DESCRIPTION
ČSN EN ISO 23131
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories. It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.