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sklademVydáno: 2019-01-24
IEC 62047-32:2019
Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators
Dispositifs à semiconducteurs - Dispositifs microélectromécaniques - Partie 32: Méthode d’essai pour la vibration non linéaire des résonateurs MEMS
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| Označení normy: | IEC 62047-32:2019 |
| Vydáno: | 2019-01-24 |
| Jazyk: | Anglicky/Francouzsky |
DESCRIPTION
IEC 62047-32:2019
IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.