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sklademVydáno: 2019-04-05
IEC 62047-34:2019
Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer
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| Označení normy: | IEC 62047-34:2019 |
| Vydáno: | 2019-04-05 |
| Jazyk: | Anglicky |
DESCRIPTION
IEC 62047-34:2019
IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.