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Homepage>UNE EN 62047-10:2011 Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials (Endorsed by AENOR in December of 2011.)

UNE EN 62047-10:2011

Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials (Endorsed by AENOR in December of 2011.)

Dispositivos semiconductores. Dispositivos micro-electromecánicos. Parte 10: Ensayo de compresión de los micropilares en materiales MEMS. (Ratificada por AENOR en diciembre de 2011.)

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Označení normy:	UNE EN 62047-10:2011
Počet stran:	15
Vydáno:	2011-12-01
Status:	Norma

DESCRIPTION

This standard UNE EN 62047-10:2011 Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials (Endorsed by AENOR in December of 2011.) is classified in these ICS categories:

31.080.99

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