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Homepage>UNE EN 62047-12:2011 Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures (Endorsed by AENOR in February of 2012.)

UNE EN 62047-12:2011

Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures (Endorsed by AENOR in February of 2012.)

Dispositivos semiconductores. Dispositivos micro-electromecánicos. Parte 12: Método de ensayo de fatiga al doblado de materiales de película fina utilizando vibración resonante de las estructuras MEMS. (Ratificada por AENOR en febrero de 2012.)

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Označení normy:	UNE EN 62047-12:2011
Počet stran:	33
Vydáno:	2012-02-01
Status:	Norma

DESCRIPTION

This standard UNE EN 62047-12:2011 Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures (Endorsed by AENOR in February of 2012.) is classified in these ICS categories:

31.080.99

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