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Homepage>UNE EN 62047-26:2016 Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures (Endorsed by AENOR in June of 2016.)
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sklademVydáno: 2016-06-01
UNE EN 62047-26:2016 Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures (Endorsed by AENOR in June of 2016.)

UNE EN 62047-26:2016

Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures (Endorsed by AENOR in June of 2016.)

Dispositivos semiconductores. Dispositivos microelectromecánicos. Parte 26: Descripción y métodos de medición para microsurcos y estructuras de agujas (Ratificada por AENOR en junio de 2016.)

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Označení normy:UNE EN 62047-26:2016
Počet stran:35
Vydáno:2016-06-01
Status:Norma
DESCRIPTION

This standard UNE EN 62047-26:2016 Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures (Endorsed by AENOR in June of 2016.) is classified in these ICS categories:

  • 31.080.99
Categories:
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