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sklademVydáno: 2011-02-01
UNE EN 62047-4:2010
Semiconductor devices - Micro-electromechanical devices -- Part 4: Generic specification for MEMS (Endorsed by AENOR in February of 2011.)
Dispositivos semiconductores. Dispositivos micro-electromecánicos. Parte 4: Especificaciones generales para MEMS. (Ratificada por AENOR en febrero de 2011.)
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Označení normy: | UNE EN 62047-4:2010 |
Počet stran: | 23 |
Vydáno: | 2011-02-01 |
Status: | Norma |
DESCRIPTION
This standard UNE EN 62047-4:2010 Semiconductor devices - Micro-electromechanical devices -- Part 4: Generic specification for MEMS (Endorsed by AENOR in February of 2011.) is classified in these ICS categories:
- 31.080.99
Categories: