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sklademVydáno: 2019
ISO 18516:2019
ISO 18516:2019-Surface chemical analysis — Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres
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5950 Kč
Označení normy: | ISO 18516:2019 |
Počet stran: | 53 |
Vydání: | 2 |
Vydáno: | 2019 |
Jazyk: | Anglicky |
Popis
ISO 18516:2019
This document describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis. It applies to all methods of surface analysis which use a beam to analyse the chemical composition of surfaces under defined settings of an instrument. It applies to scanning instruments, where a finely focused beam is scanned over the sample in a preselected field of view, as well as to full field imaging instruments, where the field of view is simultaneously imaged by a broad beam, an imaging lens system and a pixelated detector. The methods for measuring lateral resolution and sharpness are — the straight edge method; — the narrow line method; — the grating method. This document applies to instruments and methods that provide information on layers with nanometre thicknesses and to surfaces with nanometre‐sized structures and individual nano‐objects.