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Hlavní stránka>ISO 22278:2020-Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam
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sklademVydáno: 2020
ISO 22278:2020-Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

ISO 22278:2020

ISO 22278:2020-Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

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Označení normy:ISO 22278:2020
Počet stran:29
Vydání:1
Vydáno:2020
Jazyk:Anglicky
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ISO 22278:2020


This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.