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Hlavní stránka>PD ISO/TR 15969:2021 Surface chemical analysis. Depth profiling. Measurement of sputtered depth
sklademVydáno: 2021-03-26
PD ISO/TR 15969:2021 Surface chemical analysis. Depth profiling. Measurement of sputtered depth

PD ISO/TR 15969:2021

Surface chemical analysis. Depth profiling. Measurement of sputtered depth

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Označení normy:PD ISO/TR 15969:2021
Počet stran:22
Vydáno:2021-03-26
ISBN:978 0 539 15432 0
Status:Standard
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PD ISO/TR 15969:2021


This standard PD ISO/TR 15969:2021 Surface chemical analysis. Depth profiling. Measurement of sputtered depth is classified in these ICS categories:
  • 71.040.40 Chemical analysis

This document provides guidelines for measuring the sputtered depth in sputtered depth profiling.

The methods of sputtered depth measurement described in this document are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to several micrometres. The depth typically determined by this approach is between 1 nm to 500 µm.


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