PD ISO/TR 19319:2013

This standard PD ISO/TR 19319:2013 Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods is classified in these ICS categories:

• 71.040.40 Chemical analysis

This Technical Report describes:

1. Functions and their relevance to lateral resolution:

   1. Point spread function (PSF) — see 4.1.1

   2. Line spread function (LSF) — see 4.1.2

   3. Edge spread function (ESF) — see 4.1.3

   4. Modulation transfer function (MTF) — see 4.1.4

   5. Contrast transfer function (CTF) — see 4.1.5.

2. Experimental methods for the determination of lateral resolution and parameters related to lateral resolution:

   1. Imaging of a narrow stripe — see 4.2

   2. Imaging of a sharp edge — see 4.3

   3. Imaging of square-wave gratings — see 4.4.

3. Physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy — see Clauses 5 and 6.