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Hlavní stránka>PD ISO/TR 19319:2013 Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
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sklademVydáno: 2013-03-31
PD ISO/TR 19319:2013 Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

PD ISO/TR 19319:2013

Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

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Označení normy:PD ISO/TR 19319:2013
Počet stran:126
Vydáno:2013-03-31
ISBN:978 0 580 71186 2
Status:Standard
Popis

PD ISO/TR 19319:2013


This standard PD ISO/TR 19319:2013 Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods is classified in these ICS categories:
  • 71.040.40 Chemical analysis

This Technical Report describes:

  1. Functions and their relevance to lateral resolution:

    1. Point spread function (PSF) — see 4.1.1

    2. Line spread function (LSF) — see 4.1.2

    3. Edge spread function (ESF) — see 4.1.3

    4. Modulation transfer function (MTF) — see 4.1.4

    5. Contrast transfer function (CTF) — see 4.1.5.

  2. Experimental methods for the determination of lateral resolution and parameters related to lateral resolution:

    1. Imaging of a narrow stripe — see 4.2

    2. Imaging of a sharp edge — see 4.3

    3. Imaging of square-wave gratings — see 4.4.

  3. Physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy — see Clauses 5 and 6.


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