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Hlavní stránka>UNE EN 62047-9:2011 Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS (Endorsed by AENOR in June of 2012.)
sklademVydáno: 2012-06-01
UNE EN 62047-9:2011 Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS (Endorsed by AENOR in June of 2012.)

UNE EN 62047-9:2011

Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS (Endorsed by AENOR in June of 2012.)

Dispositivos semiconductores. Dispositivos micro-electromecánicos. Parte 9: Medida de la resistencia de la unión oblea a oblea para NEMS. (Ratificada por AENOR en junio de 2012.)

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Označení normy:UNE EN 62047-9:2011
Počet stran:29
Vydáno:2012-06-01
Status:Norma
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This standard UNE EN 62047-9:2011 Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS (Endorsed by AENOR in June of 2012.) is classified in these ICS categories:

  • 31.080.99
: